发明名称 Methods for measuring optical characteristics by differential diffractive scanning
摘要 Methods and systems for measuring and/or inspecting a characteristic of an optical article are provided. In one example, a method includes illuminating an optical article with a focused beam of light, detecting the light with a sensor after interacting with the optical article, determining a deflection angle of the beam of light, and determining a characteristic of the optical article based on the deflection angle. In one example, a system includes a light source, an optical element, and a sensor. The optical element focuses light from the light source to a reference location, the sensor detects the light from the reference location and generates signals associated with the intensity and position of the light received. A processor may receive the signals from the sensor and thereby determine a deflection angle of the light from the probe path.
申请公布号 US7435941(B2) 申请公布日期 2008.10.14
申请号 US20040800111 申请日期 2004.03.12
申请人 INPHASE TECHNOLOGIES, INC. 发明人 AYRES MARK R.
分类号 H01J40/14;G01M11/00;G01N21/41;G01N21/47;G11B7/0065;G11B7/135 主分类号 H01J40/14
代理机构 代理人
主权项
地址