| 摘要 |
The present invention refers to a test pattern (1), a set of test patterns (13), a method of evaluating the transfer properties of a test pattern as well as a method of determining at least one parameter of a transfer process. By the test pattern (1) of the present invention, the impact of line edge roughness on a transferred pattern can be analyzed. In particular, the test pattern (1) is based upon a lines/spaces pattern, wherein periodic structures (3) having a well-defined period and amplitude are adjacent and contiguous to the lines (2). The invention further is directed to a method of evaluating the transfer properties of such a test pattern (1). In addition, the invention refers to a method of determining at least one parameter of a transfer process such as an imaging process making use of such a test pattern (1). |
