| 摘要 |
A probe contact system for adjusting the distance between the tip end of a contactor and a contact target by means of a simple, low−cost mechanism. This plane adjusting mechanism comprises a contact substrate having many contactors, a probe card for forming an electric connection between contactors and the test head of a semiconductor test system, a probe card ring provided between the probe card and the frame of the probe contact system for mechanical connection between them, and a connection member for connecting the probe card with the probe card ring at three−point positions on the probe card and being rotated so as to be able to adjust the distance between the probe card and the probe card ring. In another embodiment, a required number of shims are inserted to adjust the distance between the probe card and the probe card ring.
|
