SUBSTRATE STRUCTURE WITH BUILT IN INDUCTOR AND METHOD OF MANUFACTURING THE SAME

摘要

A substrate structure including an inductor and a manufacturing method thereof are provided to improve the Q factor of the inductor by reducing parasitic capacitance between conductive patterns. A base member(100) includes a conductive layer(110). An inductor includes a plurality of conductive patterns(120,130,140) which are stacked on an upper surface of the base member. An insulating layer is inserted between the conductive patterns. The conductive patterns are concentric patterns having a frame structure. The adjacent conductive patterns of the conductive patterns are arranged cornerwise not to be overlapped with each other. The conductive layer applies a predetermined signal to one conductive pattern selected from the conductive patterns.