| 摘要 |
FIELD: physics. ^ SUBSTANCE: test structure for estimation of curvature radius of scanning probe microscopy cantilever needle-point consists of foundation with vertical needle-points. The foundation contains close-packed relief cellular near-surface layer, adjacent cells have common wall. Each cell is at least five-walled, walls of each cell are vertical, and cell wall tops are concave. Needle-points are joined in knot areas of three wall tops of various cells, curvature radius of needle-point tops is 1 to 3 nm, and needle-point heights are 20 to 100 nm. Distance between separate needle-points is 10 to 500 nm, near-surface foundation layer is made of aluminium. The foundation represents substrate with thin aluminium film containing near-surface foundation layer. The substrate is made of single-crystalline silicon. ^ EFFECT: improved reproducibility of cantilever needle curvature radius estimation. ^ 4 cl, 6 dwg |
