SENSITIVE ELEMENT OF GYROSCOPE ON SURFACE ACOUSTIC WAVES

摘要

FIELD: physics. ^ SUBSTANCE: sensitive element consists of piezoelectric plate containing generated interdigital transducers of surface acoustic wave driver, and reflecting pattern outside of interdigital transducers of surface acoustic wave driver. Interdigital transducers of surface acoustic wave sensitive element and grooves within acoustic wave path formed with interdigital transducers of surface acoustic wave driver are provided by different sides of piezoelectric plate. Grooves can contain through holes. ^ EFFECT: higher accuracy of angular speed measurement. ^ 7 cl, 2 dwg