| 摘要 |
PROBLEM TO BE SOLVED: To reduce deformation of a piezoelectric vibration element and frequency draft resulted therefrom caused by the temperature change of a sensor or a buffer solution, or a variety of another reasons in a QCM sensor which detects the amount of adsorbed material on the surface of the piezoelectric vibration element from the change of the resonance frequency of the piezoelectric vibration element. SOLUTION: For electric connection between the electrode of a piezoelectric vibration element and the connection electrode of a sensor board side, fine gap is set between the both electrodes to form a capacitor, and in keeping electric connection in terms of AC, only flexible adhesives are used to fix the piezoelectric vibration element on the sensor board and for its waterproofing without using conductive adhesives which are usually used. COPYRIGHT: (C)2009,JPO&INPIT
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