| 摘要 |
PROBLEM TO BE SOLVED: To provide a compound object having excellent corrosion resistance to corrosive gases and reactive gases, such as fluorine based gas, fluorine plasma, fluorine radical, gaseous oxygen, plasma and radicals, and having sufficient mechanical strength and a manufacturing method of the same. SOLUTION: The compound object includes a substrate, an aluminum thin film formed on the substrate, and a barrier type anodization film formed on the aluminum thin film. COPYRIGHT: (C)2009,JPO&INPIT
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