| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet delivery apparatus and a method for replacing a liquid droplet delivery head each with an excellent productivity capable of controlling a distance between a nozzle and a substrate. SOLUTION: The system relates to the liquid droplet delivery apparatus 1 that delivers liquid droplets from the nozzle of a liquid droplet delivery head 15 and performs plotting while relatively moving the head 15 to a substrate 7 loaded on a loading surface 6. The system is provided with a head position measuring apparatus 17 that measures a distance between the surface 6 and the nozzle, a head position moving apparatus that moves the head 15 in the direction that can change a distance between the nozzle and the surface 6, and a head position controlling section that performs control at a target distance between the nozzle and the surface 6 by driving a head position moving apparatus. The head position controlling section calculates a difference between the nozzle and the surface 6 measured by the apparatus 17 and the target distance, and the head position moving apparatus moves the head 15 by a distance portion equivalent to a difference to approximate the distance between the nozzle and the loading surface 6 to the target distance. COPYRIGHT: (C)2009,JPO&INPIT
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