| 摘要 |
The present invention includes a waveguide for outputting radio frequency wave, a vacuum envelope provided with a slow-wave circuit, a coaxial connection part connecting the waveguide and the vacuum envelope, an insulating window member which is provided in the coaxial connection part and which hermetically seals a said of vacuum envelope and a said of waveguide, a coaxial center conductor of exterior portion with one end supported by the waveguide, and a coaxial center conductor of an interior portion with one end abutting on the slow-wave circuit and the other end connected to the coaxial center conductor of the exterior portion. The waveguide is provided with a screw part supporting the coaxial center conductor of the exterior portion movably in an axial direction of the coaxial center conductor of the exterior portion. An end portion of the coaxial center conductor of the exterior portion is connected to the end portion of the coaxial center conductor of the interior portion movably in the axial direction of the coaxial center conductor of the exterior portion.
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