Polyhydric phenol compound and chemically amplified resist composition containing the same

摘要

The present invention provides a polyhydric phenol compound represented by the formula (I): wherein at least one selected from R¹, R², R³, R⁴, and R⁵ is a group represented by the formula (II): wherein X¹, X², X³ and X⁴ each independently represent a hydrogen atom or a C1-C4 alkyl group, n represents an integer of 0 to 3, Z¹ represents a C1-C6 alkyl group or a C3-C12 cycloalkyl group, and ring Y represents an alicyclic hydrocarbon group, and the others are hydrogen atoms, and a chemically amplified resist composition containing the same.