SINTERED METAL COMPONENTS FOR CRYSTAL GROWTH REACTORS

摘要

An injector apparatus for a crystal growth reactor having a graphite casing, a stainless steel nozzle, a nozzle holder to position the nozzle within the graphite casing, a lower injector disposed within the graphite casing and extending around the nozzle to a point above the nozzle to direct gas flow from the nozzle, an upper injector comprising metal carbide disposed within the casing above the lower injector and spaced apart from the lower injector, and an upper injector.