| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a thin-film chip resistor that can be manufactured at low cost and is excellent in reliability. <P>SOLUTION: A manufacturing method for a thin-film chip resistor includes a step to form many top electrodes 12 by printing and baking organic metal paste on the top surface of a sheet-like insulating substrate, a step to cover at least a part of many top electrodes 12 and to form many thin-film resistors 13 to be electrically connected with many top electrodes 12, and a step to form many inorganic protection films 14 to cover many thin-film resistors 13. A metal mask consisting of 42 alloy is mounted on the top surface of the sheet-like insulating substrate to form the thin-film resistors 13 with mask sputter. Subsequently, the inorganic protection films 14 are formed with the mask sputter continuously without removing the metal mask. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
