DEVICE AND METHOD OF INSPECTING ELECTRO-OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a device of inspecting an electro-optical device capable of quantitatively measuring optical leakage characteristics in a condition similar to an actual use environment in measurement of electric characteristics of a transistor. SOLUTION: The device of inspecting the electro-optical device includes: a stage 30 for mounting a large plate 110; a condensing lens 62 at an extension end 61s of an optical fiber cable 61 positioned upward of the stage 30; an illuminometer 31 provided so that a condensing face 31s has the same height H as a mounting face 30s on the stage 30 in a part of the outer peripheral part of the stage 30 and for measuring a light amount of light radiated from the condensing lens 62; and a probe card 35 for measuring the electric characteristics of the transistor and the optical leakage characteristics of TFT by being brought into contact with a test element group of TFT of a TFT substrate provided upward of the stage 30. COPYRIGHT: (C)2009,JPO&INPIT