| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning device that provides an ultrasonic cleaning effect to a glass substrate for a magnetic disk to be cleaned without variation due to positions in an inner tank in a twin-tub type ultrasonic cleaning system. SOLUTION: The ultrasonic cleaning device 100 includes: the inner tank 110 for storing a cleaning liquid 140; an outer tank 120 for storing an ultrasonic medium solution 150 to hold the inner tank 110 inside the ultrasonic medium solution 150; an ultrasonic oscillating board 130 that is attached on the bottom surface of the outer tank 120, radiates an ultrasonic wave, and cleans the magnetic disk glass substrate 170 placed in the cleaning liquid 140 in the inner tank 110 using the ultrasonic wave; and a liquid discharging means 250 that discharges a liquid to the ultrasonic medium liquid 150 so that air bubbles 200 retained at the bottom surface 190 of the inner tank 110 moves to the outside of the bottom surface 190. By this means, the air bubbles 200 retained at the inner tank bottom surface 190 can be removed. COPYRIGHT: (C)2009,JPO&INPIT
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