| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously perform the measurement of an X-ray absorption spectrum due to an electron yield method and an absorbing method, with respect a plurality of samples. SOLUTION: Connection parts are provided to the front ends of detectors 50 and a plurality of the detectors 50 are connected in series through the connection parts 3 so as to pass incident X rays are passed. An X-ray passing through holes capable of being closed airtightly by a sample or the like are provided to the connection part 3. The connection parts 3 connect the before and behind detectors 50 so as to be hermetically held from the open air X-ray intensity measuring electrodes 15a and 15b, and Auger electron collecting electrode 16 are provided in the detectors 50 and either one of the electrodes are selected to be operated. Measurement is performed at the same time by the absorbing method due to the measurement of the intensities of X rays before behind the sample, and electron yield method due to the detectors before and behind the sample is performed at the same time. COPYRIGHT: (C)2009,JPO&INPIT
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