| 摘要 |
PROBLEM TO BE SOLVED: To obtain a polishing device capable of automatically polishing optical components while shortening a polishing time as less as possible, and a method for controlling the polishing device. SOLUTION: A dwell time of polisher at respective positions of a face to be polished is calculated based on data relating to a correlation of a polishing time and a polishing volume fetched by polishing optical components for fetching data with a same specification as optical components L to be polished with polisher, and an error volume from a design value of a measurement value of a shape of the face to be polished. The dwell time at a certain position is re-calculated based on a correction value relating to the dwell time at the certain position of the face to be polished, so as to automatically scan and control the polisher based on dwell time information at the respective positions reflected by re-calculated results. COPYRIGHT: (C)2009,JPO&INPIT
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