Sensor Chip for a Biosensor

摘要

The invention relates to a microchip ( 10 ) and a microfluidic biosensor ( 200 ) comprising such a microchip ( 10 ) as a sensor. The microchip ( 10 ) may particularly comprise coupling circuits on its sensitive side for generating and sensing magnetic fields. The circuits are connected by feedthrough connections (VIAs) to terminals ( 204 ) at the back side of the microchip ( 10 ) for external bonding. The front side of the sensor chip ( 10 ) can thus be kept freely accessible from a sample chamber ( 206 ). The back side of the sensor chip ( 10 ) may particularly be flip-chip bonded to a signal processing chip ( 20 ), which is connected to external circuits by a flex foil ( 202 ).