| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a control method that can achieve high-speed operation while taking the non-linearity of a piezoelectric actuator into consideration. <P>SOLUTION: Using a voltage V supplied to the piezoelectric actuator and induced electric charge "q" as inputs, displacement x and load F of the piezoelectric actuator are estimated and a voltage to be supplied is set up based on the displacement x and the load F. Under the assist by an actuator model in consideration of the non-linearity, the displacement x and the load F are estimated based on a hysteresis function structured from a plurality of functions including two functions f<SB>1</SB>(q) and f<SB>2</SB>(q) of at least equation 1. <P>COPYRIGHT: (C)2009,JPO&INPIT |
