COLOR FILTER MANUFACTURING DEVICE, COLOR FILTER MANUFACTURING METHOD, DRYING DEVICE, DRYING METHOD, DISPLAY MANUFACTURING DEVICE, AND DISPLAY MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a color filter manufacturing device and method which prevents the occurrence of defects resulting from drops of dew, to improve yield by removing drops of a condensed solvent.

SOLUTION: In a pressure reduction heater 8a, air in a chamber 41 is sucked to reduce the pressure by a pressure reduction part 9, and a color layer 45 of a substrate 3 is heated by a heating part 10. A vaporized component 51 is produced by vaporization of water and the solvent from the color layer 45. The vaporized component 51 is deposited in an upper part of the chamber 41 as drops of dew 53. The pressure reduction heater 8a includes a liquid component removal part (for example, a scraping mechanism 54) for removing liquid components deposited in the upper part of the chamber. The liquid component removal part removes drops of dew 53 before the vaporized component 51 drops onto the substrate 3 as drops of dew 53. Consequently, drops of dew 53 are prevented from being dropped to be deposited again on the color layer 45 of the substrate 3.

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