OPTICAL FORMING SYSTEM, EXPOSURE SYSTEM, AND EXPOSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical forming system capable of forming in a required forming precision without complicating a configuration. SOLUTION: An exposure usage domain or a mirror range to be modulated in case of exposure in a certain exposure resolution is established based on a distortion distribution of a formed image of light modulated by DMD (digital mirror device) at an exposure position. The exposure resolution is established in a unit of a partial domain of a predetermined size in each cross section. The exposure domain in each cross section is virtually divided into partial domain groups each group having each respective same established exposure resolution. The exposure is conducted to every partial domain group in which the same exposure resolution is established using the exposure usage domain corresponding to the partial domain group. COPYRIGHT: (C)2009,JPO&INPIT