发明名称 |
Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer |
摘要 |
A vapor deposition source including a crucible configured to hold a quantity of molten constituent material and at least one nozzle to pass vapor evaporated from the molten constituent material out of the crucible.
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申请公布号 |
US2008247737(A1) |
申请公布日期 |
2008.10.09 |
申请号 |
US20080154549 |
申请日期 |
2008.05.22 |
申请人 |
WENDT ROBERT G;WIEDEMAN SCOTT;BRITT JEFFREY S;MASON DOUGLAS G |
发明人 |
WENDT ROBERT G.;WIEDEMAN SCOTT;BRITT JEFFREY S.;MASON DOUGLAS G. |
分类号 |
C23C14/26 |
主分类号 |
C23C14/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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