PROCESS FOR PRODUCTION OF SILICON TETRACHLORIDE BY REACTION OF SILICON METAL AND CHLORINE WITH INTERNAL COOLING

摘要

Process for producing silicon tetrachloride, SiCI₄ by reaction of silicon metal, Si and chlorine, Cl₂ in a reactor. The temperature and rate of reaction is controlled by simultaneous, direct injection of chlorine and a cooling medium to the reaction zone of the reactor where the cooling medium is introduced as a liquid at a temperature lower than the reactor temperature and evaporates inside the reactor utilizing its heat of evaporation and its specific heat capacity for cooling. The cooling medium may preferably be silicon tetrachloride or an inert gas.