| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a color filter, in which the occurrence of damage (scrap) of a support in dry etching processing and generation of an etching product are suppressed. <P>SOLUTION: In the method of manufacturing the color filter using first mixed gas and second mixed gas, the color filter is manufactured by a first stopper layer formation step, a colored layer formation step, a second stopper layer formation step, a photo resist layer formation step, an image formation step, a first etching step, a photo resist layer removal step and a second etching step. <P>COPYRIGHT: (C)2009,JPO&INPIT |
