发明名称 RESIN SEAL DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent the occurrence of partial thermal expansion difference by leveling the partial deviation of heat produced in a movable platen to prevent the distortion of the movable platen. SOLUTION: In this resin seal device 100 equipped with a main body 130, the up and down reciprocally movable platen 140 enclosed in the main body 130 and a resin seal unit 101 having a heater 115 for heating a resin, a plurality of the resin seal units 101 are adjacently arranged and provided with a hollow part 140A so as to extend from the bottom surface side of the movable platen 140 to the upper surface side thereof with a ball screw 150 for reciprocating movement arranged in the hollow part 140A and an air jet port 142 provided for circulating the air in the hollow part 140A. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008238424(A) 申请公布日期 2008.10.09
申请号 JP20070078250 申请日期 2007.03.26
申请人 SUMITOMO HEAVY IND LTD 发明人 OKADA MAKOTO
分类号 B29C45/64;B29C45/14;B29C45/78;B29C45/80;B29L31/34;H01L21/56 主分类号 B29C45/64
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