| 摘要 |
PROBLEM TO BE SOLVED: To reduce the flow of purge gas to be supplied into a space where a radial magnetic bearing and a motor are stored, while reducing the consumption of the purge gas. SOLUTION: In the turbo-molecular pump 1, the purge gas is supplied into the space formed between a rotor shaft 10 and a bearing housing 5a. On a top upper face 5c of the bearing housing 5a, a first seal member 21 is provided for sealing a gap formed between the rotor shaft 10 and the bearing housing 5a. On a top outer peripheral face 5d of the bearing housing 5a, a second seal member 22 is provided for sealing a gap formed between a moving blade 11 and the bearing housing 5a. COPYRIGHT: (C)2009,JPO&INPIT
|
