| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem arising in an aerosol generator when cracked pieces and a powder are placed in a mixed state and a filter through which only particulates of a prescribed size can pass is installed near an aerosol outlet, and to provide a method and an apparatus for producing a structure which offers a high formation efficiency of a dense film with a uniform particle size by preventing clogging of a nozzle and discharging particulates of a uniform size. SOLUTION: The aerosol generator has the cracked pieces placed in a mixed state with the powder of the particulates, a first filter that does not contact the cracked pieces and through which only particulates of a prescribed size can pass and a second filter having pores through which the cracked pieces cannot pass. The second filter is installed at upstream of the first filter in the gas-flowing direction, leaving a gap between the first filter. COPYRIGHT: (C)2009,JPO&INPIT
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