| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment apparatus capable of precisely aligning a plurality of liquid droplet delivery heads in a liquid droplet delivery unit with a simpler apparatus configuration than in a conventional art. SOLUTION: The inclination of an LR camera is aligned with that of a reference line of a master plate, a focus of the LR camera is changed from a pattern formation plane of the master plate to a nozzle formation plane of the head, so that the inclinations of the heads are aligned to that of the LR camera to align the inclinations of a plurality of the heads. COPYRIGHT: (C)2009,JPO&INPIT
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