| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
SJMAENOK, LEONID AIZIKOVITCH;SMITS, JOSEPHUS JACOBUS;BANINE, VADIM YEVGENYEVICH;VAN DEN WILDENBERG, LAMBERTUS ADRIANUS;SCHMIDT, ALEXANDER ALEXANDROVITCH;WASSINK, ARNOUD CORNELIS;BROM, PAUL PETER ANNA ANTONIUS;VERPALEN, ERIC LOUIS WILLEM;VAN DE PAS, ANTONIUS JOHANNES |
