发明名称 CONTOUR RESONATOR AND ADJUSTMENT METHOD THEREFOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a contour resonator having desired resonance frequency and temperature characteristics, and to provide an adjustment method therefor. <P>SOLUTION: The contour resonator 10 has a vibrating body 20 formed of a quadrangular plate with the cut angle of a crystal substrate represented as YXlt &phiv;/&theta; in an IRE standard; exciting electrodes 30, 31 formed at both front and back surfaces of the vibrating body 20 to regulate a resonant frequency, and temperature-characteristic adjusting films 41, 42 formed on the surfaces of the exciting electrodes 30, 31 to adjust the temperature characteristics. The exciting electrodes 30, 31 are formed on both front and back surfaces of the vibrating body 20, after forming the vibrating body 20, the temperature-characteristic adjusting films 41, 42 are formed to adjust the temperature characteristics, after the resonance frequency is adjusted, by changing the thickness and/or the area of the exciting electrodes 30, 31, and the contour resonator can be provided with the desired resonance frequency and temperature characteristics. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008245243(A) 申请公布日期 2008.10.09
申请号 JP20070290450 申请日期 2007.11.08
申请人 EPSON TOYOCOM CORP 发明人 YAMADA AKINORI
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/22;H01L41/253;H03H3/02;H03H3/04 主分类号 H03H9/19
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