| 摘要 |
<P>PROBLEM TO BE SOLVED: To recognize a defect point in an X-ray image and to automatically obtain position information of the defect point. <P>SOLUTION: When adjusting operation parameters including capacitance values of integration amplifiers amplifying charges read from an X-ray plane detector and gains of amplifiers amplifying output of the integration amplifiers, a pixel value which is output from the X-ray plane detector under exposure with X-rays, is compared with a reference level range of expected values. On the basis of a result of the comparison, the operation parameters are automatically determined within the reference level range of expected values and after the determination of the operation parameters, an offset correction coefficient for correcting an offset component of the X-ray plane detector is automatically set. After the offset correction coefficient is completely set, a gain correction coefficient is automatically set so as to provide the pixel value to be output from the X-ray plane detector. After the gain correction coefficient is completely set, X-ray images output from the X-ray plane detector under exposure with X-rays are collected to apply offset correction processing and gain correction processing thereto, a defect point is recognized in these corrected X-ray images, and position information of the defect point is automatically obtained. <P>COPYRIGHT: (C)2009,JPO&INPIT |
