| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology to prevent deterioration of a shut-off function of a shut-off valve provided in just proximity of a processing vessel in a cleaning gas supplying path for supplying a corrosive cleaning gas. SOLUTION: For supplying a purge gas to the secondary side of the shut-off valve provided in the proximity of the cleaning gas supplying path during heat treatment, the purge gas is controlled to flow into the secondary side of the shut-off valve via a diaphragm of the shut-off valve. In more concrete, a purge gas charging port allowing flow of the purge gas into a ventilating chamber is formed in the opposite side of a discharging port of the cleaning gas via the diaphragm in the ventilating chamber where the diaphragm for opening and closing the cleaning gas charging port is arranged. COPYRIGHT: (C)2009,JPO&INPIT
|
