MICROFLUIDIC ENCAPSULATED NEMS RESONATORS

摘要

A device includes a microfluidic channel and a nanoelectromechanical mass detector encapsulated within the microfluidic channel. Multiple microfluidic channels may be included with multiple nano electromechanical mass detectors encapsulated within each microfluidic channel. A method of detecting masses includes delivering a sample via the microfluidic channel to the nano electromechanical mass detectors and creating a pressure within the microfluidic channel that significantly reduces viscous damping effects on the mass detector. The detector may be actuated and response measured.