APPARATUS AND METHODS FOR SYSTEMATIC NON-UNIFORMITY CORRECTION USING A GAS CLUSTER ION BEAM
摘要
<p>Embodiments of an apparatus and methods for correcting systematic non- uniformities using a gas cluster ion beam (202) are generally described herein. Other embodiments may be described and claimed.</p>
申请公布号
WO2008121628(A1)
申请公布日期
2008.10.09
申请号
WO2008US58171
申请日期
2008.03.26
申请人
TEL EPION INC.;CALIENDO, STEVEN;HOFMEESTER, NICOLAUS
