| 摘要 |
PROBLEM TO BE SOLVED: To form a resonator which has superior size controllability by making uniform variance in etching speed due to microloading effect. SOLUTION: An etching mask is used to manufacture the MEMS vibrator having an oscillator which has both ends fixed to a base body and vibrating in a vibrating direction and electrodes fixed to the base body in parallel to the oscillator so as not to vibrate and each disposed at one of both sides of the oscillator, and the etching mask includes a mask pattern 36 for oscillator covering an oscillator formation planned region 34 on a conductive film 30 formed on the entire surface of a sacrificial film covering a region on a main surface except both ends of the oscillator and a mask pattern 40 for electrode which covers an electrode formation planned region 38 on the conductive film. The mask pattern for oscillator and mask pattern for electrode are as wide as each other in the vibrating direction, and the interval between the mask pattern for oscillator and mask pattern for electrode is equal to the interval between adjacent mask patterns for electrode. COPYRIGHT: (C)2009,JPO&INPIT
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