| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of estimating rotor temperature without sampling sensor signals in synchronization with the rotational position of a magnetic body. SOLUTION: Magnetic bodies 102A, 102B and a concavity part 103 are provided on a rotor side, and are detected by two gap sensors 44A, 44B. Sensor signal at a time when magnetic bodies 102A, 102B oppose to the gap sensors 44A, 44B, changes between HI and LOW according to rotor temperature Tr. Four patterns A-D are generated according to combination of HI/LOW state of the gap sensors 44A, 44B. Since type of the pattern generated according to a temperature range, rotor temperature can be estimated from difference of the type. COPYRIGHT: (C)2009,JPO&INPIT
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