| 摘要 |
PROBLEM TO BE SOLVED: To prevent adhesion of foreign matters and formation of a flaw due to contact with a mask respectively in an insulating membrane and an organic membrane in a manufacturing method of an organic EL element in which a first electrode, the insulating membrane demarcating a pixel region, the organic membrane to carry out light emission, a second electrode, and a sealing membrane are formed on a substrate sequentially. SOLUTION: In a forming process of the organic membrane 40, in a state that the mask 100 for organic membrane formation is not in contact and separated from the insulating membrane 30, the mask 100 for organic membrane formation is arranged on the substrate 10, and membrane formation of the organic membrane 40 is carried out. In a forming process of the second electrode 50, in a state that the mask 200 for second electrode formation is not in contact and separated from the insulating membrane 30 and the organic membrane 40, the mask 200 for second electrode formation is arranged on the substrate 10, and membrane formation of the second electrode 50 is carried out. COPYRIGHT: (C)2009,JPO&INPIT
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