| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanner which accurately detects an angular dislocation even when the angular displacement is large. SOLUTION: The optical scanner 1 includes: a main body part 11 on the surface of which a mirror face is formed; elastically deformable elastic connection parts 12a and 12b which connect the main body part 11 and a supporting part 3; comb-teeth shaped electrode parts 13a, 13b, 14a, 14b, 14c and 14d which are provided on the main body part 11 and formed into a comb-shape; and comb-teeth shaped electrode parts 4a, 4b, 5a, 5b, 5c and 5d which are engaged with comb-teeth shaped electrode parts 13a, 13b, 14a, 14b, 14c and 14d with a predetermined gap. The main body part 11 oscillates around a turning axis composed of elastic connection parts 12a and 12b by applying an electric voltage between the comb-teeth shaped electrode parts 13a, 13b and the comb-teeth shaped electrode parts 4a, 4b. Further, the scanning angle of the main body part 11 is detected by the electrostatic capacity between the comb-teeth shaped electrode parts 14a to 14d and the electrode pats 5a to 5d. COPYRIGHT: (C)2009,JPO&INPIT
|
