| 摘要 |
<p>A laser processing apparatus is provided improve productivity of workpieces by increasing the processing speed without moving a chuck table adapted to hold the workpiece. A laser processing apparatus comprises a stationary base(2), a chuck table mechanism(3), a laser beam irradiation unit support mechanism(4), and a laser beam irradiation unit(5). The chuck table mechanism is adopted to hold a workpiece that is placed on the stationary base so as to be movable in a process-transfer direction. The laser beam irradiation unit support mechanism is disposed on the stationary base so as to be movable in an indexing-transfer direction perpendicular to the process-transfer direction. The laser beam irradiation unit is disposed on the laser beam unit support mechanism. The chuck table mechanism includes a pair of guide rails(31), a first slide block(32), a second slide block(33), a cover table(35), and a chuck table(36).</p> |
