APPARATUS FOR MIXING ACCELERATOR AND APPARATUS FOR CLEANING A SUBSTRATE HAVING THE SAME

摘要

An accelerator mixing apparatus and a substrate cleaning apparatus having the same are provided to improve cleaning efficiency by using a power type accelerator. A mixing tank(110) receives and mixes a supercritical fluid and a power accelerator. An accelerator storage chamber(120) stores the powder accelerator and is positioned at an upper part of the mixing tank. A first valve(122) is positioned between the mixing tank and the accelerator storage chamber to supply the powder accelerator from the accelerator storage chamber to the mixing tank and to maintain a sealing state of the mixing tank. A second valve(112) controls a flow path of the supercritical fluid to maintain the sealing state of the mixing tank when the supercritical fluid is mixed with the power accelerator. A third valve(114) controls a supply flow path of the supercritical fluid from the mixing tank to maintain the sealing state of the mixing tank when the supercritical fluid is mixed with the power accelerator.