发明名称 FIBER STRUCTURE
摘要 <P>PROBLEM TO BE SOLVED: To provide a fiber structure not only enabling abrasive grain to be utilized efficiently but also enabling polishing to be carried out with very little defects such as scratch when used as an abrasive cloth, and useful as the abrasive cloth having excellent smoothness and polishing rate. <P>SOLUTION: The fiber structure having a surface layer substantially consisting of fiber has &le;2 cc/cm<SP>2</SP>/sec air permeability. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008240168(A) 申请公布日期 2008.10.09
申请号 JP20070078605 申请日期 2007.03.26
申请人 TORAY IND INC 发明人 HASHIMOTO TAKASHI;NONAKA SHUICHI;IIJIMA HIROMICHI;MURAKAMI KAKUJI
分类号 D06M11/38;B24B37/24;D01F6/92;D01F8/14;D04H3/016;D06M11/00;H01L21/304 主分类号 D06M11/38
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