| 摘要 |
PROBLEM TO BE SOLVED: To combine stability with sensitivity of an electrostatic pressure transducer at a high level in a balanced manner. SOLUTION: The electrostatic pressure transducer includes: a substrate; an electrode plate comprising a deposition film on the substrate; a diaphragm comprising a deposition film having a gap between the electrode plate and forming a counter electrode facing the electrode plate with the gap therebetween; and a cantilever comprising a deposition layer deposited on a layer closer to the electrode plate than the diaphragm, pushing the diaphragm in a state where the cantilever is bent in the direction of approaching the diaphragm from a proximal end part to a distal end part by internal stress. COPYRIGHT: (C)2009,JPO&INPIT
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