METAL FINE PARTICLE DISPERSED FILM AND METHOD FOR MANUFACTURING METAL FINE PARTICLE DISPERSED FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal fine particle dispersed film in which metal fine particles are densely dispersed in a silicon oxide film without aggregating.

SOLUTION: The method for manufacturing the metal fine particle dispersed film includes: forming a silicon oxide film by bringing an organosilane into hydrolysis and polycondensation reactions while leaving hydroxyl or alkoxide groups in side chains; bringing the silicon oxide film into contact with an acidic aqueous tin chloride solution; and bringing the silicon oxide film into contact with an aqueous solution of a metal chelate to disperse metal fine particles in the silicon oxide film.

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