| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe for a microscope capable of simultaneously a shape of a sample surface and a plurality of physical properties in a micro region, and a scanning probe microscope. SOLUTION: The probe for a microscope comprises: a cantilever 22 having an insulation layer 28 on the surface; a probe section 21 placed at the top end of the cantilever, that is needle-shaped; a first metal structure 29 arranged on the upper surface of the cantilever, having a first end at the top end of the cantilever; a second metal structure 30 arranged on the upper surface of the cantilever, having a second end 301 at the top end of the cantilever; a conductive layer 70 formed in the vicinity of the probe section; and a third metal structure 80 placed apart from the first and the second metal structure on the upper surface of the cantilever, and connected to the conductive layer. COPYRIGHT: (C)2009,JPO&INPIT
|
