| 摘要 |
PROBLEM TO BE SOLVED: To suppress variation of sensor characteristics by deformation of a gel member in a pressure sensor for sealing the back surface of a diaphragm with the gel member. SOLUTION: The length T1 of a pressure transmission path is set equal to the sum of the depth of a recessed part 3d of a sensor chip 3, the length of a through hole 4a of a pedestal 4 (thickness of the pedestal 4), and the length of a wall surface 2c of the case 2. When a part having the smallest inner diameter of the pressure transmission path, namely the smaller one of the inner diameter L1 of a hole formed by the wall surface 2c of the case 2 and the inner diameter L2 of the through hole 4a of the pedestal 4, is set Lmin, the aspect ratio (T1/Lmin) shown by the ratio of the length T1 of the pressure transmission path to the Lmin is set 4 or less, preferably≤3, more preferably≤2. COPYRIGHT: (C)2009,JPO&INPIT
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