发明名称 |
SYSTEM FOR GENERATING A SET OF TEST PATTERNS FOR AN OPTICAL PROXIMITY CORRECTION ALGORITHM |
摘要 |
A system of synthesizing layout patterns to test an optical proximity correction algorithm. The method comprises the steps of: embodying Walsh patterns in a set of Walsh pattern matrices; processing groups of matrices from the set of Walsh pattern matrices to form a set of test matrices; mapping the set of test matrices to a test pattern set.
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申请公布号 |
US2008247633(A1) |
申请公布日期 |
2008.10.09 |
申请号 |
US20080117934 |
申请日期 |
2008.05.09 |
申请人 |
DEMARIS DAVID L;LAVIN MARK A;LEIPOLD WILLIAM C;MAYNARD DANIEL N;MUKHERJEE MAHARAJ |
发明人 |
DEMARIS DAVID L;LAVIN MARK A.;LEIPOLD WILLIAM C.;MAYNARD DANIEL N.;MUKHERJEE MAHARAJ |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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