发明名称 METHODS FOR CONTROLLING CATALYST NANOPARTICLE POSITIONING AND APPARATUS FOR GROWING A NANOWIRE
摘要 A method for controlling catalyst nanoparticle positioning includes establishing a mask layer on a post such that a portion of a vertical surface of the post remains exposed. The method further includes establishing a catalyst nanoparticle material on the mask layer and directly adjacent at least a portion of the exposed portion of the vertical surface.
申请公布号 US2008246123(A1) 申请公布日期 2008.10.09
申请号 US20070697818 申请日期 2007.04.09
申请人 KAMINS THEODORE I 发明人 KAMINS THEODORE I.
分类号 H01L21/44;H01L23/58 主分类号 H01L21/44
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