发明名称 THREE DIMENSIONAL MICROSTRUCTURES AND METHODS FOR MAKING THREE DIMENSIONAL MICROSTRUCTURES
摘要 Systems and methods for depositing a plurality of droplets in a three-dimensional array are disclosed. The array can comprise a first type of droplets disposed to form a support structure and a second type of droplets forming a conductive seed layer on the support structure. A structure material can be electrodeposited onto the seed layer to create a three-dimensional structure.
申请公布号 KR20080091140(A) 申请公布日期 2008.10.09
申请号 KR20087016893 申请日期 2008.07.11
申请人 FORMFACTOR, INCORPORATED 发明人 MATHIEU GAETAN L.;FANG TRELIANT;HOBBS ERIC D.
分类号 H01L21/20;H01L21/00 主分类号 H01L21/20
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