发明名称 |
THREE DIMENSIONAL MICROSTRUCTURES AND METHODS FOR MAKING THREE DIMENSIONAL MICROSTRUCTURES |
摘要 |
Systems and methods for depositing a plurality of droplets in a three-dimensional array are disclosed. The array can comprise a first type of droplets disposed to form a support structure and a second type of droplets forming a conductive seed layer on the support structure. A structure material can be electrodeposited onto the seed layer to create a three-dimensional structure. |
申请公布号 |
KR20080091140(A) |
申请公布日期 |
2008.10.09 |
申请号 |
KR20087016893 |
申请日期 |
2008.07.11 |
申请人 |
FORMFACTOR, INCORPORATED |
发明人 |
MATHIEU GAETAN L.;FANG TRELIANT;HOBBS ERIC D. |
分类号 |
H01L21/20;H01L21/00 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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