METHOD FOR MANUFACTURING CARBON NANOWALL

摘要

PROBLEM TO BE SOLVED: To improve the crystallinity of a carbon nanowall. SOLUTION: In a method for manufacturing a carbon nanowall wherein the carbon nanowall is formed on the surface of a substrate by using a plasma atmosphere of a raw material substance containing at least carbon and fluorine as constituent elements and hydrogen, the invented method is characterized by adding the formation of oxygen plasma to the plasma atmosphere. COPYRIGHT: (C)2009,JPO&INPIT