| 摘要 |
PROBLEM TO BE SOLVED: To provide an array type ultrasonic wave probe with an acoustic matching layer having three or more layers, in contact with a piezoelectric device, and is superior in dicing workability with a low attenuation ratio, heat resistance, adhesion between upper and lower layers, and conductivity, and is composed of magnesium alloy having an adequate acoustic impedance. SOLUTION: An array type ultrasonic wave probe has a backing, a plurality of channels respectively having a piezoelectric device and an acoustic matching layer having three or more layers formed on the piezoelectric device arranged on the backing, and an acoustic lens. The piezoelectric device is composed of a piezoelectric body and electrodes formed on a backing side and an acoustic matching layer side respectively of the piezoelectric body, and has an acoustic impedance of 25-40 MRayls at 25°C. The electrode on the acoustic matching layer side of the piezoelectric device has a thickness of 5μm or less. In the acoustic matching layer having three or more layers, the acoustic impedance is gradually reduced for the acoustic lens, and the acoustic matching layer in contact with the electrode is composed of a magnesium alloy of Mg-Sn system or Mg-Cu system having an acoustic impedance of 11-19 MRayls at 25°C. COPYRIGHT: (C)2009,JPO&INPIT
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